JPH0334619B2 - - Google Patents
Info
- Publication number
- JPH0334619B2 JPH0334619B2 JP12157184A JP12157184A JPH0334619B2 JP H0334619 B2 JPH0334619 B2 JP H0334619B2 JP 12157184 A JP12157184 A JP 12157184A JP 12157184 A JP12157184 A JP 12157184A JP H0334619 B2 JPH0334619 B2 JP H0334619B2
- Authority
- JP
- Japan
- Prior art keywords
- gas
- magnetic recording
- base material
- magnetic
- mixed gas
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 230000005291 magnetic effect Effects 0.000 claims description 45
- XEEYBQQBJWHFJM-UHFFFAOYSA-N Iron Chemical compound [Fe] XEEYBQQBJWHFJM-UHFFFAOYSA-N 0.000 claims description 27
- 239000007789 gas Substances 0.000 claims description 23
- 239000000463 material Substances 0.000 claims description 16
- 239000010408 film Substances 0.000 claims description 12
- 229910052742 iron Inorganic materials 0.000 claims description 12
- 238000004519 manufacturing process Methods 0.000 claims description 11
- 238000000034 method Methods 0.000 claims description 9
- 239000000758 substrate Substances 0.000 claims description 8
- 239000010409 thin film Substances 0.000 claims description 7
- MYMOFIZGZYHOMD-UHFFFAOYSA-N Dioxygen Chemical compound O=O MYMOFIZGZYHOMD-UHFFFAOYSA-N 0.000 claims description 6
- 229910001873 dinitrogen Inorganic materials 0.000 claims description 6
- 229910001882 dioxygen Inorganic materials 0.000 claims description 6
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 claims description 5
- 230000001678 irradiating effect Effects 0.000 claims description 3
- 150000002500 ions Chemical class 0.000 description 16
- 230000008020 evaporation Effects 0.000 description 7
- 238000001704 evaporation Methods 0.000 description 7
- 239000010941 cobalt Substances 0.000 description 5
- 229910017052 cobalt Inorganic materials 0.000 description 5
- 238000000151 deposition Methods 0.000 description 5
- GUTLYIVDDKVIGB-UHFFFAOYSA-N cobalt atom Chemical compound [Co] GUTLYIVDDKVIGB-UHFFFAOYSA-N 0.000 description 4
- 230000000052 comparative effect Effects 0.000 description 4
- 230000008021 deposition Effects 0.000 description 3
- 229920006254 polymer film Polymers 0.000 description 3
- 238000001816 cooling Methods 0.000 description 2
- 238000005260 corrosion Methods 0.000 description 2
- 230000007797 corrosion Effects 0.000 description 2
- 239000011521 glass Substances 0.000 description 2
- 238000007740 vapor deposition Methods 0.000 description 2
- 229910000531 Co alloy Inorganic materials 0.000 description 1
- 229910000831 Steel Inorganic materials 0.000 description 1
- 150000001868 cobalt Chemical class 0.000 description 1
- 239000013078 crystal Substances 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 238000010891 electric arc Methods 0.000 description 1
- 238000010894 electron beam technology Methods 0.000 description 1
- 239000003302 ferromagnetic material Substances 0.000 description 1
- -1 nitrogen gas ions Chemical class 0.000 description 1
- 230000003287 optical effect Effects 0.000 description 1
- 239000010959 steel Substances 0.000 description 1
Landscapes
- Magnetic Record Carriers (AREA)
- Manufacturing Of Magnetic Record Carriers (AREA)
- Thin Magnetic Films (AREA)
- Physical Vapour Deposition (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP12157184A JPS61926A (ja) | 1984-06-13 | 1984-06-13 | 鉄系薄膜型磁気記録媒体の製造方法 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP12157184A JPS61926A (ja) | 1984-06-13 | 1984-06-13 | 鉄系薄膜型磁気記録媒体の製造方法 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS61926A JPS61926A (ja) | 1986-01-06 |
| JPH0334619B2 true JPH0334619B2 (en]) | 1991-05-23 |
Family
ID=14814527
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP12157184A Granted JPS61926A (ja) | 1984-06-13 | 1984-06-13 | 鉄系薄膜型磁気記録媒体の製造方法 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS61926A (en]) |
Families Citing this family (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2735836B2 (ja) * | 1987-04-15 | 1998-04-02 | 三洋電機株式会社 | 薄膜形成方法 |
| JPH0770058B2 (ja) * | 1987-04-16 | 1995-07-31 | 富士写真フイルム株式会社 | 磁気記録媒体の製造方法及び製造装置 |
| DE59608441D1 (de) * | 1996-01-10 | 2002-01-24 | Alcan Tech & Man Ag | Verfahren und Vorrichtung zum Beschichten einer Substratfläche |
-
1984
- 1984-06-13 JP JP12157184A patent/JPS61926A/ja active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPS61926A (ja) | 1986-01-06 |
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